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JOURNALS // Fizika i Tekhnika Poluprovodnikov // Archive

Fizika i Tekhnika Poluprovodnikov, 2022 Volume 56, Issue 10, Pages 1011–1015 (Mi phts7140)

Manufacturing, processing, testing of materials and structures

Growth of hexagonal boron nitride (hBN) on silicon carbide substrates by the physical vapor transport method

E. N. Mokhov, V. Yu. Davydov, A. N. Smirnov, S. S. Nagalyuk

Ioffe Institute, 194021 St. Petersburg, Russia

Abstract: The possibility of growing hexagonal boron nitride (hBN) of high structural perfection on hexagonal silicon carbide (SiC) substrates using the physical vapor transport method is demonstrated. The results obtained indicate that this method is promising for the formation of large-area high-quality hBN/SiC heterostructures in the course of one technological process, which have a high potential for device applications.

Keywords: hexagonal boron nitride, high-temperature sublimation from the gas phase, Raman spectroscopy, photoluminescence.

Received: 15.09.2022
Revised: 23.09.2022
Accepted: 26.09.2022

DOI: 10.21883/FTP.2022.10.53964.9961



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© Steklov Math. Inst. of RAS, 2025