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JOURNALS // Fizika i Tekhnika Poluprovodnikov // Archive

Fizika i Tekhnika Poluprovodnikov, 2022 Volume 56, Issue 12, Pages 1112–1119 (Mi phts7155)

This article is cited in 3 papers

Surface, interfaces, thin films

Formation and properties of mesoporous MoS$_2$ films

A. B. Loginova, S. N. Bokovabc, P. V. Fedotovbc, I. V. Sapkova, D. N. Khmelenind, R. R. Ismagilova, E. D. Obraztsovabc, B. A. Loginove, A. N. Obraztsova

a Lomonosov Moscow State University, Faculty of Physics, 119991 Moscow, Russia
b Prokhorov General Physics Institute of the Russian Academy of Sciences, 119991 Moscow, Russia
c Moscow Institute of Physics and Technology (National Research University), 141701 Moscow Oblast, Dolgoprudny, Russia
d FSRC "Crystallography and Photonics" RAS, 119333 Moscow, Russia
e National Research University of Electronic Technology, 124498 Moscow, Russia

Abstract: Molybdenum disulfide is a crystalline material which attracts considerable attention due to explicit two-dimensional character of its electronic properties. To obtain MoS$_2$ films thermally evaporated molybdenum and gaseous H$_2$S were used as precursors in this work. As a result of chemical reaction of these precursors films consisting of flake-like of nanometer thickness assembled from parallel atomic layers with predominantly perpendicular (with respect to substrate surface) orientation were deposited on the surface of Si substrate. In this work we investigate the dependence of film morphology on deposition time, substrate temperature and concentration of precursors in gaseous phase. Presence of mono- and bi-layered structures in the film was revealed using Raman spectroscopy and electron microscopy. Dependence of photoluminescence properties on size of crystallites in produced films was also studied.

Keywords: 2D materials, transition metal dichalcogenides, flakes, monolayers, mesoporous films.

Received: 23.09.2022
Revised: 14.11.2022
Accepted: 09.12.2022

DOI: 10.21883/FTP.2022.12.54509.4129



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