Abstract:
The limits of applicability of the Hall method for separate determination of the impurity concentration are considered for the case of doping with only one main impurity. A diagram is constructed in the coordinate plane, with the dimensionless (because different semiconductors are used) parameter $N^{1/3}a$ plotted along the abscissa axis, and the degree of impurity compensation $K$, along the ordinate axis. The resulting curve is both a generalization of the experimental data available in publications and the result of the present study of weakly compensated Si. The curve divides the $N^{1/3}a$–$K$ plane into two parts, with the Hall method applicable for determining the impurity concentrations in part I and inapplicable in part II.