Effect of the interaction conditions of the probe of an atomic-force microscope with the $n$-GaAs surface on the triboelectrization phenomenon

Triboelectrization as a result of the scanning of an atomic-force-microscope probe over an $n$-GaAs surface in the contact mode is investigated. The dependences of the local potential variation on the scanning rate and the pressing force of the probe are obtained. The results are explained by point-defect formation in the surface layers of samples under the effect of deformation of these layers during probe scanning. The charge localized at these defects in the case of equilibrium changes the potential of surface, which is subject to triboelectrization. It is shown that, for qualitative explanation of the observed dependences, it is necessary to take into account both the generation and annihilation of defects in the region experiencing deformation.