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Fizika i Tekhnika Poluprovodnikov, 2015 Volume 49, Issue 10, Pages 1335–1338 (Mi phts7404)

Electronic properties of semiconductors

Influence of the ionization-energy losses of high-energy bismuth ions on the development of helium blisters in silicon

V. F. Reutova, S. N. Dmitrieva, A. S. Sokhatskiia, A. G. Zaluzhnyb

a Joint Institute for Nuclear Research, Flerov Laboratory of Nuclear Reactions
b National Engineering Physics Institute "MEPhI", Moscow

Abstract: Understanding the behavior of helium in solids under conditions of intense ionizing radiation is of particular interest in solving many problems of nuclear, fusion, and space materials science and also in microelectronics. The observed effect of suppressing the formation of helium blisters on the surface of helium ion-doped silicon as a result of irradiation with high-energy bismuth ions is reported in this publication. It is suggested that a possible decrease in the concentration of helium atoms in silicon is due to their radiationinduced desorption from the area of doping in terms of the high-impact ionization of bismuth ions.

Received: 17.03.2015
Accepted: 26.03.2015


 English version:
Semiconductors, 2015, 49:10, 1290–1293

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