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Fizika i Tekhnika Poluprovodnikov, 2015 Volume 49, Issue 10, Pages 1397–1401 (Mi phts7417)

This article is cited in 5 papers

Amorphous, glassy, organic semiconductors

X-ray fluorescence analysis of Ge$_{1-x}$Se$_x$, As$_{1-x}$Se$_x$, and Ge$_{1-x-y}$As$_y$Se$_x$ glasses using electronic excitation

E. I. Terukova, P. P. Sereginb, A. V. Marchenkob, D. V. Zhilinaa, K. U. Bobokhuzhaevc

a Ioffe Institute, St. Petersburg
b Herzen State Pedagogical University of Russia, St. Petersburg
c National University of Uzbekistan named after M. Ulugbek, Tashkent

Abstract: X-ray fluorescence analysis with fluorescence excitation by an electron beam with an energy of 30 kV is applied to determine the germanium, arsenic, and selenium contents in Ge$_{1-x}$Se$_x$, As$_{1-x}$Se$_x$, and Ge$_{1-x-y}$As$_y$Se$_x$ glassy alloys. Using calibration dependences, the quantitative composition of the glasses is determined with an accuracy of $\pm$ 0.0002 for parameters $x$ and $y$ in a surface layer $\sim$ 0.1 $\mu$m deep.

Received: 19.02.2015
Accepted: 25.02.2015


 English version:
Semiconductors, 2015, 49:10, 1352–1356

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