M. G. Mynbaeva, S. P. Lebedev, A. A. Lavrent'ev, K. J. Mynbaev, A. A. Golovatenko, A. A. Lebedev, V. I. Nikolaev, “On the self-structuring of single-crystal silicon wafers under inductive heating in vacuum”, Fizika i Tekhnika Poluprovodnikov, 2014, Volume 48, Issue 3,Pages <nobr>364

Micro- and nanocrystalline, porous, composite semiconductors

On the self-structuring of single-crystal silicon wafers under inductive heating in vacuum

M. G. Mynbaeva^a, S. P. Lebedev^a, A. A. Lavrent'ev^a, K. J. Mynbaev^ab, A. A. Golovatenko^abc, A. A. Lebedev^a, V. I. Nikolaev^abc

^a Ioffe Institute, St. Petersburg
^b St. Petersburg National Research University of Information Technologies, Mechanics and Optics
^c Perfect Crystals LLC, Saint-Petersburg

Abstract: The self-organized structuring of the surface of single-crystal silicon wafers under high-frequency annealing in a carbon-containing atmosphere is reported. The effect can be used to develop new maskless methods for the fabrication of structured materials for different functional purposes.

Received: 17.07.2013
Accepted: 19.08.2013