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Fizika i Tekhnika Poluprovodnikov, 2014 Volume 48, Issue 6, Pages 753–758 (Mi phts7608)

This article is cited in 12 papers

Surface, interfaces, thin films

On InAsSbP epitaxial layers with ultimate phosphorus content, lattice-matched with an InAs substrate

V. V. Romanov, M. V. Baidakova, K. D. Moiseev

Ioffe Institute, St. Petersburg

Abstract: Experimental results obtained upon the growth of InAs$_{1-x-y}$Sb$_y$P$_x$ multicomponent solid solutions with 0.43 $< x <$ 0.72 by metal-organic vapor-phase epitaxy at low deposition temperatures ($T<$ 520$^\circ$C) with a metal-organic source of arsenic are presented. A model is suggested for describing the growth of an InAsSbP epitaxial layer that is isomorphic with the InAs substrate at a given ratio between the phosphorus and antimony concentrations in the solid phase.

Received: 08.10.2013
Accepted: 21.10.2013


 English version:
Semiconductors, 2014, 48:6, 733–738

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