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Fizika i Tekhnika Poluprovodnikov, 2025 Volume 59, Issue 2, Pages 91–96 (Mi phts7615)

XXIX Symposium "Nanophysics and Nanoelectronics", Nizhny Novgorod, March 10-14, 2025

Magnetic field characterization of physical properties of two-dimensional electron gas of nitride high electron mobility transistor heterostructures

N. K. Chumakova, A. A. Andreeva, I. V. Belova, B. V. Goncharova, Yu. V. Grishchenkoa, I. S. Ezubchenkoa, A. B. Davydovb, M. L. Zanaveskina, E. M. Kolobkovaa, L. A. Morgunb, S. N. Nikolaeva, K. E. Prikhod'koa, I. A. Chernykha, S. Yu. Shabanova, V. G. Valeeva

a National Research Centre "Kurchatov Institute", Moscow
b P. N. Lebedev Physical Institute, Russian Academy of Sciences, Moscow

Abstract: Analysis of the magnetic field dependence of magnetoresistance and Shubnikov–de Haas oscillations allows us to determine the concentration of charge carriers, as well as temperature and electron density dependencies of the transport and quantum mobility of the two-dimensional electron gas in AlGaN/AlN/GaN high-electron-mobility transistor heterostructures. Unlike the standard Hall method, which requires 4-contact measurements and additional technological procedures for creating test modules, the proposed technique uses 2 contacts and allows to compare the two-dimensional electron gas parameters in finished high-electron- mobility transistors and in the initially synthesized heterostructures.

Received: 26.03.2025
Revised: 23.06.2025
Accepted: 23.06.2025

DOI: 10.61011/FTP.2025.02.60982.7751



© Steklov Math. Inst. of RAS, 2025