Synthesis of compositionally different multicomponent metal-oxide films (SnO$_2$)$_x$(ZnO)$_{1-x}$ ($x$ = 1–0.5)

The study is concerned with high-purity SnO$_2$ and ZnO powders produced from salt solutions of corresponding metals by low-temperature hydrothermal synthesis. Fragments of SnO$_2$ and ZnO ceramic targets formed as 1 $\times$ 8 cm bars are fabricated by dry pressing. The bars are used to form composite targets for ion-beam sputtering and the fabrication of compositionally different (SnO$_2$)$_x$(ZnO)$_{1-x}$ ($x$ = 1 – 0.5) films appropriate for the production of gas sensors or transparent electronic devices. The optical and electrical parameters of the films with different compositions are studied.