A. Yu. Egorov, P. N. Brunkov, E. V. Nikitina, E. V. Pirogov, M. S. Sobolev, A. Lazarenko, M. V. Baidakova, D. A. Kirilenko, S. G. Konnikov, “Multiperiod quantum-cascade nanoheterostructures: Epitaxy and diagnostics”, Fizika i Tekhnika Poluprovodnikov, 2014, Volume 48, Issue 12,Pages <nobr>1640

This article is cited in 8 papers

Semiconductor structures, low-dimensional systems, quantum phenomena

Multiperiod quantum-cascade nanoheterostructures: Epitaxy and diagnostics

A. Yu. Egorov^a, P. N. Brunkov^ab, E. V. Nikitina^a, E. V. Pirogov^a, M. S. Sobolev^a, A. Lazarenko^a, M. V. Baidakova^b, D. A. Kirilenko^b, S. G. Konnikov^b

^a St. Petersburg Academic University — Nanotechnology Research and Education Centre of the Russian Academy of Sciences (the Academic University)
^b Ioffe Institute, St. Petersburg

Abstract: Advances in the production technology of multiperiod nanoheterostructures of quantum-cascade lasers with 60 cascades by molecular-beam epitaxy (MBE) on an industrial multiple-substrate MBE machine are discussed. The results obtained in studying the nanoheterostructures of quantum-cascade lasers by transmission electron microscopy, high-resolution X-ray diffraction analysis, and photoluminescence mapping are presented.

Received: 20.05.2014
Accepted: 30.05.2014