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Fizika i Tekhnika Poluprovodnikov, 2013 Volume 47, Issue 4, Pages 516–520 (Mi phts7879)

This article is cited in 3 papers

Semiconductor physics

Field-effect transistor based on ZnO nanorods with a variable threshold cutoff voltage

A. N. Gruzintseva, A. N. Redkina, C. Opokub, M. N. Shkunova

a Institute of Microelectronics Technology and High-Purity Materials RAS
b Advanced Technology Institute, University of Surrey, Guildford, GU2 7XH, UK

Abstract: This study is concerned with the fabrication and electrical characteristics of short-channel (2 $\mu$m) field-effect transistors (FETs) based on ZnO nanorods. In FET fabrication, single-crystal ZnO nanorods are grown using the catalyst-free chemical vapor deposition (CVD) method. Although the short-channel ZnO-nanorod FETs exhibit good electrical characteristics (a transconductance of 100 nS, electron mobility of 6 cm$^2$ V$^{-1}$ s$^{-1}$, and a large turn-ON/OFF ratio of 10$^4$), their characteristics significantly depend on the length of the nanorods. The effect of the drain-source voltage on the threshold gate voltage is studied.

Received: 30.05.2012
Accepted: 21.06.2012


 English version:
Semiconductors, 2013, 47:4, 538–542

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