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Fizika i Tekhnika Poluprovodnikov, 2013 Volume 47, Issue 6, Pages 772–776 (Mi phts7924)

This article is cited in 2 papers

Surface, interfaces, thin films

Study of the I–V characteristics of nanostructured Pd films on a Si substrate after vacuum annealing

S. V. Tomilin, A. S. Yanovskii, O. A. Tomilina, G. R. Mikaelyan

Zaporizhzhya National University

Abstract: The I–V characteristics of nanostructured Pd films on a Si substrate are investigated. The nanostructures (nanoislands) are formed by the vacuum annealing of continuous ultrathin Pd films sputtered onto a substrate. The shape of the I–V characteristics of the investigated Si substrate-Pd film system is shown to be heavily dependent on the degree of film nanostructuring. The surface morphology of the films is studied using scanning electron microscopy.

Received: 06.08.2012
Accepted: 28.08.2012


 English version:
Semiconductors, 2013, 47:6, 782–786

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