A. L. Vikharev, A. M. Gorbachev, M. P. Duhnovskii, A. B. Muchnikov, A. K. Ratnikova, Yu. Yu. Fedorov, “Combined single-crystalline and polycrystalline CVD diamond substrates for diamond electronics”, Fizika i Tekhnika Poluprovodnikov, 2012, Volume 46, Issue 2,Pages <nobr>274

This article is cited in 12 papers

Manufacturing, processing, testing of materials and structures

Combined single-crystalline and polycrystalline CVD diamond substrates for diamond electronics

A. L. Vikharev^a, A. M. Gorbachev^a, M. P. Duhnovskii^b, A. B. Muchnikov^a, A. K. Ratnikova^b, Yu. Yu. Fedorov^b

^a Institute of Applied Physics, Russian Academy of Sciences, Nizhny Novgorod
^b Research and Production Corporation "Istok" named after Shokin, Fryazino, Moskovskaya obl.

Abstract: The fabrication of diamond substrates in which single-crystalline and polycrystalline CVD diamond form a single wafer, and the epitaxial growth of diamond films on such combined substrates containing polycrystalline and (100) single-crystalline CVD diamond regions are studied.

Received: 04.07.2011
Accepted: 11.07.2011