F. F. Komarov, E. V. Kotov, A. P. Novikov, S. A. Petrov, T. T. Samoiluk, “Residual Defects in Silicon under Implantation of As<nobr>$^{+}$</nobr> Ions in the Self-Annealing Mode”, Fizika i Tekhnika Poluprovodnikov, 1987, Volume 21, Issue 10,Pages <nobr>1863

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Fizika i Tekhnika Poluprovodnikov, 1987 Volume 21, Issue 10, Pages 1863–1867 (Mi phts918)

Residual Defects in Silicon under Implantation of As$^{+}$ Ions in the Self-Annealing Mode

F. F. Komarov, E. V. Kotov, A. P. Novikov, S. A. Petrov, T. T. Samoiluk