A. J. Urbyalis, Yu. J. Dudonis, L. J. Ргаnyavichyus, “Effect of Implantation Dose on Recrystallization of Poly-Si Layers by a CO<nobr>$_2$</nobr> Continuous-Wave Laser”, Fizika i Tekhnika Poluprovodnikov, 1986, Volume 20, Issue 3,Pages <nobr>393

JOURNALS // Fizika i Tekhnika Poluprovodnikov // Archive

Fizika i Tekhnika Poluprovodnikov, 1986 Volume 20, Issue 3, Pages 393–397 (Mi phts94)

Effect of Implantation Dose on Recrystallization of Poly-Si Layers by a CO$_2$ Continuous-Wave Laser

A. J. Urbyalis, Yu. J. Dudonis, L. J. Ргаnyavichyus

UDC: 621.315.592

Received: 12.04.1985
Accepted: 06.06.1985

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