Properties of thin FePt films synthesized by sequential sputtering of components

Thin (001)-oriented FePt films in the form of multilayer [Pt/Fe]$_n$ structures have been synthesized by means of sequential RF magnetron sputtering of the components. The dependence of the microstructure, magnetic properties, and magnetic anisotropy of the [Pt/Fe]$_n$ system on the substrate temperature during deposition, the type of the first deposited layer, the thicknesses of the partial Fe and Pt layers, and the total film thickness has been studied.