R. V. Goldshtejn, K. B. Ustinov, P. S. Shushpannikov, M. V. Mezhennyi, M. G. Mil'vidskii, V. Ya. Reznik, “Evaluating intrinsic deformations in oxygen-containing precipitates”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 2008, Volume 34, Issue 3,Pages <nobr>32

This article is cited in 1 paper

Evaluating intrinsic deformations in oxygen-containing precipitates

R. V. Goldshtejn^a, K. B. Ustinov^a, P. S. Shushpannikov^a, M. V. Mezhennyi^b, M. G. Mil'vidskii^b, V. Ya. Reznik^b

^a Ishlinsky Institute for Problems in Mechanics of the Russian Academy of Sciences, Moscow
^b JSC "Giredmet" SRC RF, the Federal State Research and Design Institute of Rare Metal Industry, Moscow

Abstract: A new method is proposed for evaluation of the intrinsic deformations of precipitates in silicon based on an analysis of the precipitate-dislocation arrays that appear at the late stages of multistep thermal treatment of silicon wafers. The estimate can be used for determining the fraction of a matrix substance present in the precipitate.

Received: 02.03.2007
Accepted: 29.06.2007