V. A. Veretennikov, Yu. S. Leonov, V. I. Mishachev, O. G. Semenov, “Single-pulse lithography performance with the use of high-intensive emission of the electrodischarge source”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 1985, Volume 11, Issue 19,Pages <nobr>1200

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Pisma v Zhurnal Tekhnicheskoi Fiziki, 1985 Volume 11, Issue 19, Pages 1200–1203 (Mi pjtf1018)

Single-pulse lithography performance with the use of high-intensive emission of the electrodischarge source

V. A. Veretennikov, Yu. S. Leonov, V. I. Mishachev, O. G. Semenov

Received: 06.06.1985

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