Determining conditions for 13.5-nm radiation generation by a supersonic-xenon-jet laser plasma source

We propose and justify a simple calculation method for (i) evaluating the optimum conditions for the generation of extreme ultraviolet (EUV) emission by a laser plasma source employing a supersonic xenon jet and (ii) finding ways to increase in the efficiency of such sources. The main processes involved in the interaction of laser radiation with a xenon jet target, which account for the EUV emission with a wavelength of 13.5 nm, are taken into account. It is shown that one of the main factors that decreases the output efficiency of such EUV sources is the absorption of generated radiation by the gas target. Qualitative calculations of the optimum conditions for the generation at 13.5 nm have been performed for three lasers with various wavelengths. The most promising results can be expected for a CO$_2$ laser, for which the radiation conversion efficiency on the order of 3% at a xenon pressure of 10–15 Torr can be achieved.