A. I. Zhmakin, I. P. Ipatova, Yu. N. Makarov, M. A. Sinicin, A. A. Fursenko, B. S. Yavich, “Investigation of factors, determining the thickness homogeneity of gallium-arsenide epitaxial layers in the <nobr>$Ga(CH_{3})_{3}-As\,H_{3}-H_{2}$</nobr> system”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 1986, Volume 12, Issue 8,Pages <nobr>506

Investigation of factors, determining the thickness homogeneity of gallium-arsenide epitaxial layers in the $Ga(CH_{3})_{3}-As\,H_{3}-H_{2}$ system

A. I. Zhmakin, I. P. Ipatova, Yu. N. Makarov, M. A. Sinicin, A. A. Fursenko, B. S. Yavich

Ioffe Physico-Technical Institute USSR Academy of Sciences, Leningrad

Received: 15.02.1986