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// Pisma v Zhurnal Tekhnicheskoi Fiziki
// Archive
Pisma v Zhurnal Tekhnicheskoi Fiziki,
1984
Volume 10,
Issue 10,
Pages
577–581
(Mi pjtf1245)
PHOTOETCHING OF PRELIMINARY IRRADIATED POLYMER-FILMS
K. A. Valiev
,
L. V. Velikov
,
S. D. Dushenkov
, A. M. Prokhorov
, M. N. Filippov
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Steklov Math. Inst. of RAS
, 2024