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JOURNALS // Pisma v Zhurnal Tekhnicheskoi Fiziki // Archive
Pisma v Zhurnal Tekhnicheskoi Fiziki, 1989 Volume 15, Issue 6, Pages 72–76 (Mi pjtf2598)
ANALYSIS OF ELASTIC TENSION DISTRIBUTION UNDER PLANAR GETTERING OF SILICONE STRUCTURES

V. V. Artamonov, M. Ya. Valakh, B. N. Romanyuk, I. V. Rudskoi, V. V. Strelchuk




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