K. A. Valiev, L. V. Velikov, R. K. Makhmutov, S. N. Sidoruk, V. S. Yakunin, “ELECTRON-BEAM METHOD OF TRANSFER OF A PATTERN DRAWING WITH APPROXIMATELY-0,1-MU-M ELEMENTS ON SEMICONDUCTING PLATES”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 1989, Volume 15, Issue 17,Pages <nobr>55

JOURNALS // Pisma v Zhurnal Tekhnicheskoi Fiziki // Archive

Pisma v Zhurnal Tekhnicheskoi Fiziki, 1989 Volume 15, Issue 17, Pages 55–57 (Mi pjtf2859)

ELECTRON-BEAM METHOD OF TRANSFER OF A PATTERN DRAWING WITH APPROXIMATELY-0,1-MU-M ELEMENTS ON SEMICONDUCTING PLATES

K. A. Valiev, L. V. Velikov, R. K. Makhmutov, S. N. Sidoruk, V. S. Yakunin

Fulltext: PDF file (1703 kB)

Bibliographic databases: