K. K. Burdel, A. S. Akhmanov, A. Y. Poroikov, A. V. Suvorov, N. G. Chechenin, “STUDY OF DEFECT-FORMATION IN SILICON-CARBIDE UNDER THE EXCIMER LASER-PULSE EFFECT BY THE CHANNELING TECHNIQUE”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 1990, Volume 16, Issue 3,Pages <nobr>71

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Pisma v Zhurnal Tekhnicheskoi Fiziki, 1990 Volume 16, Issue 3, Pages 71–76 (Mi pjtf3105)

STUDY OF DEFECT-FORMATION IN SILICON-CARBIDE UNDER THE EXCIMER LASER-PULSE EFFECT BY THE CHANNELING TECHNIQUE

K. K. Burdel, A. S. Akhmanov, A. Y. Poroikov, A. V. Suvorov, N. G. Chechenin

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