P. A. Aleksandrov, E. K. Baranova, V. V. Budaragin, K. D. Demakov, E. V. Kotov, S. G. Shemardov, “SYNTHESIS OF SI3N4 AMORPHOUS FILMS DURING NITROGEN ION-IMPLANTATION TO SILICON”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 1990, Volume 16, Issue 23,Pages <nobr>43

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Pisma v Zhurnal Tekhnicheskoi Fiziki, 1990 Volume 16, Issue 23, Pages 43–45 (Mi pjtf3566)

SYNTHESIS OF SI3N4 AMORPHOUS FILMS DURING NITROGEN ION-IMPLANTATION TO SILICON

P. A. Aleksandrov, E. K. Baranova, V. V. Budaragin, K. D. Demakov, E. V. Kotov, S. G. Shemardov

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