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// Pisma v Zhurnal Tekhnicheskoi Fiziki
// Archive
Pisma v Zhurnal Tekhnicheskoi Fiziki,
1991
Volume 17,
Issue 5,
Pages
69–72
(Mi pjtf3714)
FLUCTUATIONS OF ION CHARGE STATES - POSSIBLE REASON FOR INCREASE OF SHOOT DISPERSION UNDER HIGH-ENERGY IONIC IMPLANTATION
A. F. Burenkov
,
F. F. Komarov
, S. A. Fedotov
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Steklov Math. Inst. of RAS
, 2024