A. S. Ignat'ev, A. G. Petrova, Y. E. Ryabov, “STUDY OF THE FORMATION OF TITANIUM NITRIDE LAYERS UNDER THE LOW-ENERGY IMPLANTATION OF NITROGEN-IONS TO TITANIUM”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 1992, Volume 18, Issue 10,Pages <nobr>67

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Pisma v Zhurnal Tekhnicheskoi Fiziki, 1992 Volume 18, Issue 10, Pages 67–73 (Mi pjtf4313)

STUDY OF THE FORMATION OF TITANIUM NITRIDE LAYERS UNDER THE LOW-ENERGY IMPLANTATION OF NITROGEN-IONS TO TITANIUM

A. S. Ignat'ev, A. G. Petrova, Y. E. Ryabov

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