Abstract:
Effect of nitrogen plasma composition on structural-phase and elemental composition, topography, mechanical and hydrophobic properties of coatings on the basis of nitrogen-containing titanium oxide during penetration onto sample in open atmosphere is studied. It has been shown that at an equally high microhardness of the order of 25–27 GPa, by controlling the composition of the nitrogen plasma, either hydrophilic (contact angle 73$^{\circ}$) or hydrophobic coatings (contact angle 120$^{\circ}$) can be formed.