Impact of pulsed atmospheric-pressure glow discharge on nanometer-thick aluminum films

The effect of a positive pulsed corona discharge on the thin-film cathode surface was studied in atmospheric pressure air gaps of 2–8 mm at voltages of 5–15 kV. Observed current pulses had the following parameters: repetition rate about 10–15 kHz, pulse duration of 300–500 ns, and amplitude of 10–20 mA. It was shown that at relatively low average currents of 20–50 $\mu$A, the discharge transforms into the glow one near the cathode. Due to the discharge channel radial contraction to micrometer scale, Joule heating of the formed cathode layer can lead to a temperature increase up to 1000 K and cause local erosion of the cathode surface. This mechanism should be taken into account when analyzing the interaction of discharge plasma with biological objects.