Abstract:
The electrical parameters and surface morphology of the GaAs structures of ring and circular Schottky diodes before and after irradiation by neutrons with an energy of $\sim$1 MeV have been experimentally studied. Using atomic force microscopy, volumetric radiation defects have been revealed. The density of electrons has been determined and their mobility before and after irradiation has been estimated from the results of the $C$–$V$ measurements. Based on the results obtained by these two techniques, a method for determining the average size of the space charge regions of the radiation defect clusters has been proposed.
Keywords:radiation defect clusters, $C$–$V$ method, atomic force microscopy.