A study of the processes of structure formation in ceramic coatings by the kinetic Monte Carlo method

The processes of structure formation in arc-PVD Ti–Cr–N coatings are studied by computer simulation methods. A new approach to defining the geometric space for determining the positions of atoms relative to the formed dimers and crystallites is proposed. The structure parameters are calculated, and the processes of structure formation in coatings at a potential of 120 V are studied.