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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2020 Volume 46, Issue 20, Pages 3–6 (Mi pjtf4957)

This article is cited in 2 papers

Increased efficiency and duration of emission from carbon nanotubes processed in ammonia plasma

S. V. Bulyarskiiab, V. S. Belovac, E. P. Kitsyukb, A. V. Lakalina, M. S. Molodenskiia, A. A. Pavlova, R. M. Ryazanovb, A. V. Terent'eva, A. A. Shamanaevb

a Institute of Nanotechnologies of Microelectronics, Russian Academy of Sciences, Moscow, Russia
b SPC "Technological Center" Moscow, Russia
c National Research University of Electronic Technology

Abstract: A technique for obtaining carbon nanotubes (CNTs) doped with nitrogen in ammonia plasma has been developed. In this technique, CNTs synthesized by a method excluding their doping with nitrogen are post-treated in ammonia plasma. This treatment leads to a more than fivefold increase in the concentration of nitrogen (from 0.7 to 3.6 at%), a sixfold decrease in the resistance, and a 10% decrease in the work function of CNTs, resulting in stabilization of the process of cold electron emission.

Keywords: carbon nanotubes, nitrogen doping, ammonia plasma, cold electron emission.

Received: 30.12.2019
Revised: 10.07.2020
Accepted: 15.07.2020

DOI: 10.21883/PJTF.2020.20.50146.18172


 English version:
Technical Physics Letters, 2020, 46:10, 996–999

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