RUS  ENG
Full version
JOURNALS // Pisma v Zhurnal Tekhnicheskoi Fiziki // Archive

Pisma v Zhurnal Tekhnicheskoi Fiziki, 2020 Volume 46, Issue 4, Pages 30–32 (Mi pjtf5184)

This article is cited in 7 papers

Optical transparency of Zr–B–N films deposited by magnetron sputtering of ZrB$_{2}$ target

Ph. V. Kiryukhantsev-Korneev, E. A. Levashov

National University of Science and Technology «MISIS», Moscow

Abstract: Thin fims in the Zr–B–N system possessing optical transparency have been studied. It is established that increase in the volume fraction of nitrogen in the gas mixture and, hence, in the concentration of nitrogen in the coatings leads to an increase in their optical transmission due to the formation of a BN phase.

Keywords: Zr–B–N coatings, ZrB$_{2}$ cathode, magnetron sputtering, chemical composition, optical properties, transmittance, BN phase.

Received: 02.10.2019
Revised: 02.10.2019
Accepted: 15.11.2019

DOI: 10.21883/PJTF.2020.04.49047.18057


 English version:
Technical Physics Letters, 2020, 46:2, 179–181

Bibliographic databases:


© Steklov Math. Inst. of RAS, 2024