D. M. Dolginsev, M. V. Staritsyn, V. P. Pronin, E. Yu. Kaptelov, S. V. Senkevich, I. P. Pronin, S. A. Nemov, “Peculiarities of the structure and properties of thin PZT films with strongly nonuniform depth–composition profiles”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 2019, Volume 45, Issue 16,Pages <nobr>41

This article is cited in 1 paper

Peculiarities of the structure and properties of thin PZT films with strongly nonuniform depth–composition profiles

D. M. Dolginsev^a, M. V. Staritsyn^ab, V. P. Pronin^a, E. Yu. Kaptelov^ac, S. V. Senkevich^ac, I. P. Pronin^ca, S. A. Nemov^d

^a Herzen State Pedagogical University of Russia, St. Petersburg
^b I.V. Gorynin Central Research Institute of Structural Materials Prometey, National Research Center Kurchatov Institute, St. Petersburg, Russia
^c Ioffe Institute, St. Petersburg
^d Peter the Great St. Petersburg Polytechnic University

Abstract: Two-layer thin films of lead zirconate titanate (PZT) with lead content in the layers differing by 20% were deposited by RF magnetron sputtering at variable working gas pressure in the system. The phase states, compositions, and dielectric properties of two-layer films obtained with different orders of layer deposition were compared. It is established that the order of deposition significantly influences the conditions of crystallization of the perovskite phase and unipolar properties of PZT films.

Keywords: RF magnetron sputtering, thin PZT films, inhomogeneous lead distribution on thickness.

Received: 08.05.2019
Revised: 08.05.2019
Accepted: 21.05.2019

DOI: 10.21883/PJTF.2019.16.48156.17873