Characterization of the properties of barium strontium titanate films and tunable elements on their base in the frequency range of 1–60 GHz

The electrical properties of the tunable capacitors based on the barium-strontium titanate films and the films itself were investigated in a wide frequency range. The dielectric losses of ferroelectric films at frequencies up to 30 GHz were estimated based on the parameters of capacitors. The measurements were performed using the set of resonance techniques. Direct measurements of the film properties were carried out at a frequency of 60 GHz using the open resonator technique. The parameters of the capacitors were compared with semiconductor analogs to demonstrate the prospects of thin-film ferroelectric elements application in the millimeter wavelength range.