V. E. Asadchikov, S. A. Bedin, A. B. Vasil'ev, Yu. V. Grigor'ev, V. P. Naz’mov, “Regular microstructures based on polyethylene terephthalate films”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 2019, Volume 45, Issue 5,Pages <nobr>49–51</nobr>

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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2019 Volume 45, Issue 5, Pages 49–51 (Mi pjtf5518)

This article is cited in 2 papers

Regular microstructures based on polyethylene terephthalate films

V. E. Asadchikov^a, S. A. Bedin^ab, A. B. Vasil'ev^a, Yu. V. Grigor'ev^a, V. P. Naz’mov^c

^a Shubnikov Institute of Crystallography, Federal Research Center "Crystallography and Photonics", Russian Academy of Sciences, Moscow, Russia
^b Moscow State Pedagogical University, Moscow, Russia
^c G I. Budker Institute of Nuclear Physics, Siberian Branch of the Russian Academy of Sciences, Novosibirsk

Abstract: A method for forming regular dielectric and metallic microstructures based on polyethylene terephthalate films irradiated with a synchrotron radiation source through a mask with subsequent etching. To study their geometric parameters, scanning electron microscopy was used.

Received: 12.12.2018
Revised: 12.12.2018
Accepted: 13.12.2018

DOI: 10.21883/PJTF.2019.05.47399.17638

English version: Technical Physics Letters, 2019, 45:3, 232–234

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