Analysis of the structure of multilayer nanocrystalline coatings based on plasma mass transfer parameters calculated by the Monte Carlo method

The results of the simulation of plasma fluxes onto the surface of rotating substrates during the combustion of a vacuum arc of the Cr–Ti–Mo cathode system are presented. The structure and composition of the arc-PVD Ti$_{0.15}$Cr$_{0.74}$Mo$_{0.11}$N$_{0.84}$ coatings are experimentally studied. The numerical simulation results of the coating structures based on experimental data were analyzed. The possibility of the simulation of the structure of multilayer, multicomponent coatings and the concentration distribution of chemical elements and its components is shown by calculating the plasma fluxes using the Monte Carlo method.