Abstract:
Multilayer aluminum-based structures reflecting at $\lambda$(HeI) = 58.4 nm were studied. Spectral and angular dependences of the reflection coefficient of these coatings were determined using a laboratory reflectometer and at the ELETTRA and BESSY II synchrotrons. The optical characteristics of multilayer Ru/Al and Mo/Al mirrors with a protective MoSi$_2$ layer were found to be stable: the absolute change in the reflection coefficient within 18 months of storage in air was no larger than 1.5%. The peak near-normal reflection coefficient for Mo/Al mirrors at 58.4 nm was $R$ = 26.1% with FWHM $\Delta\lambda_0.5$ = 10 nm of the reflection curve.