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JOURNALS // Pisma v Zhurnal Tekhnicheskoi Fiziki // Archive
Pisma v Zhurnal Tekhnicheskoi Fiziki, 1986 Volume 12, Issue 4, Pages 240–243 (Mi pjtf56)
Reactive ion-plasma beam etching of silicon-carbide

I. V. Popov, A. L. Sirkin, V. E. Chelnokov

Ioffe Physico-Technical Institute USSR Academy of Sciences, Leningrad

Received: 24.12.1985



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