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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2018 Volume 44, Issue 10, Pages 37–45 (Mi pjtf5803)

This article is cited in 8 papers

Local oscillations of silicon–silicon bonds in silicon nitride

V. A. Volodinab, V. A. Gritsenkoabc, A. Chind

a Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk
b Novosibirsk State University
c Novosibirsk State Technical University
d National Chiao Tung University, Hsinchu, Taiwan, Republic of China

Abstract: Raman spectra of films of nearly stoichiometric amorphous silicon nitride ($a$-Si$_{3}$N$_{4}$) reveal a contribution due to local oscillations of silicon–silicon (Si–Si) bonds. This observation directly confirms that the almost stoichiometric $a$-Si$_{3}$N$_{4}$ contains Si–Si bonds, which, according to theoretical predictions, act as electron and hole traps that are responsible for the memory effect in Si$_{3}$N$_{4}$.

Received: 05.02.2018

DOI: 10.21883/PJTF.2018.10.46097.17223


 English version:
Technical Physics Letters, 2018, 44:5, 424–427

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