Atomic-force microscopy probe-activated morphological transformations in a nanophase copper wetting layer on silicon

The phase transition of the nanophase Cu$_2$Si wetting layer on a Si(001) substrate to more stable Cu silicide has been selectively activated by atomic-force microscopy in air. The transition is accompanied by an increase in the lateral size and height of grains and a decrease in their density. The effect that has been identified can be used to form ordered nanoisland ensembles and in nanolithography.