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// Pisma v Zhurnal Tekhnicheskoi Fiziki
// Archive
Pisma v Zhurnal Tekhnicheskoi Fiziki,
1987
Volume 13,
Issue 16,
Pages
967–971
(Mi pjtf590)
UHF devices on surface acoustic-waves based on technological methods of optical photolithography
A. S. Andreev
,
Yu. V. Gulyaev
,
A. M. Kmita
,
I. A. Markov
Institute of Radio Engineering and Electronics, Academy of Sciences of the USSR
Received:
17.12.1986
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Steklov Math. Inst. of RAS
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