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JOURNALS // Pisma v Zhurnal Tekhnicheskoi Fiziki // Archive
Pisma v Zhurnal Tekhnicheskoi Fiziki, 1987 Volume 13, Issue 16, Pages 971–974 (Mi pjtf591)
Direct submicron topography in the raster electron-microscope

A. V. Bezrukov, A. K. Geim, S. V. Dubonos, V. T. Petrashov

Institute of Microelectronics Technology and High-Purity Materials RAS

Received: 18.02.1987



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