Fresnec optics of the manometric range from monocrystal silicon

A. V. Davydov, A. I. Erko, L. A. Panchenko, S. V. Red'kin, G. D. Sazonova, V. A. Yunkin

Institute of Microelectronics Technology and High-Purity Materials RAS

Received: 26.04.1987

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