Abstract:
We present the results of investigations of the transport properties of graphene films obtained by thermodestruction of a 4$H$-SiC (0001) surface in argon. The charge-carrier concentration in the graphene layer was within 7 $\times$ 10$^{11}$ – 1 $\times$ 10$^{12}$ cm$^{-2}$, and the maximum mobility of electrons approached 6000 cm$^2$/(V $\cdot$ s). The achieved parameters of mobility are close to theoretical values calculated for graphene films with intrinsic conductivity on the Si face of SiC at $T$ = 300 K in the absence of intercalated hydrogen.