A. S. Rudyi, S. V. Vasilev, M. E. Lebedev, A. V. Metlitskaya, A. A. Mironenko, V. V. Naumov, A. V. Novozhilova, I. S. Fedorov, A. B. Churilov, “An experimental examination of thin films of lithium phosphorus oxynitride (a solid electrolyte)”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 2017, Volume 43, Issue 11,Pages <nobr>3

This article is cited in 2 papers

An experimental examination of thin films of lithium phosphorus oxynitride (a solid electrolyte)

A. S. Rudyi^ab, S. V. Vasilev^ab, M. E. Lebedev^b, A. V. Metlitskaya^ab, A. A. Mironenko^b, V. V. Naumov^b, A. V. Novozhilova^ab, I. S. Fedorov^b, A. B. Churilov^ab

^a P.G. Demidov Yaroslavl State University
^b Yaroslavl branch of the Institute of physics and technology, Institution of Russian academy of sciences

Abstract: The results of examination of thin-film samples of the LiPON solid electrolyte, which were synthesized by magnetron sputtering, are reported. Data on the morphology, structure, elemental and phase composition, and electrophysical parameters of LiPON films are presented.

Received: 27.12.2016

DOI: 10.21883/PJTF.2017.11.44690.16637