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JOURNALS // Pisma v Zhurnal Tekhnicheskoi Fiziki // Archive
Pisma v Zhurnal Tekhnicheskoi Fiziki, 1987 Volume 13, Issue 20, Pages 1230–1235 (Mi pjtf654)
Use of ellipsometry and VKB methods for the determination of optical profile of wave-guide layers

I. A. Khramcovskii, A. V. Mishin, V. I. Pshenitsyn


Received: 30.07.1987



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