Reflection of restricted beams of extreme ultraviolet radiation from multilayer mirrors

The influence of the beam size on the reflection of extreme ultraviolet radiation from a multilayer mirror is investigated on the basis of two-dimensional diffraction equations for slowly varying amplitudes. The boundary conditions of the diffraction problem are considered in the case of geometric optics and the Fresnel approximation. The results of numerical simulation of reciprocal space maps, as well as their sections in the horizontal (non-specular) $q_x$ and vertical (specular) $q_z$ directions are shown.