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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2024 Volume 50, Issue 19, Pages 33–35 (Mi pjtf6784)

Using current spreading resistance microscopy to determine the parameters of the barrier layer in NBN structures based on INSB

K. A. Savina, A. V. Klekovkina, I. I. Minaeva, G. N. Eroshenkoa, V. S. Krivobokab, D. E. Sviridova, A. E. Goncharovb, S. N. Nikolaeva

a P. N. Lebedev Physical Institute, Russian Academy of Sciences, Moscow
b State Research Center of Russian Federation, Federal State Unitary Enterprise "Research, Development, and Production Center "Orion", Moscow, Russia

Abstract: A new approach to visualizing the electronic subsystem of InSb/InAlSb barrier-diode structures, evaluating the homogeneity of the InAlSb layer that blocks majority carriers in such structures, and determining the height of the corresponding potential barrier was demonstrated. The approach is based on measuring the current spreading resistance on a freshly prepared split of an epitaxial heterostructure using a diamond-coated silicon probe.

Keywords: current spreading resistance, molecular beam epitaxy, IR photodetector, INSB, barrier diode heterostructures.

Received: 08.05.2024
Revised: 08.05.2024
Accepted: 07.06.2024

DOI: 10.61011/PJTF.2024.19.58654.19986



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